PDC-FMG (115V) | PDC-FMG-2 (230V)

PLASMAFLO GAS MIXER

 
The PlasmaFlo is an optional accessory that may be used with any
of our plasma cleaners. The PlasmaFlo provides more precise,
quantitative control of the gas flowrate and monitoring of vacuum
pressure, both of which are beneficial for process consistency.
A second gas source can also be added without having to manually
swap gas line.
 

FEATURES

 

Dual gas feeds for gas mixing or independent control of two process 

gasesDual process gas flowmeters49 mL/min maximum flowrate for 

atmospheric air at 0 psig*± 2% full scale accuracyThermocouple 

vacuum gauge sensor connects to plasma cleaner doorDigital meter 

displays pressure range of 1 mTorr to 760 TorrWeight: 7 lbsSize: 

8.5″ H x 10″ W x 8″ D* Maximum flowrate varies with process gas 

and regulated pressure. Correlated flowrate tables are available for 

the most common process gases (Air, Ar, N2, O2) used with our Plasma 

Cleaners and metered at 10 psig. Flowrate tables for other process gases 

and regulated pressures can be made available. Please inquire.

 

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