PDC-001 (115V) | PDC-002 (230V)
PDC-001 (115V) | PDC-002 (230V)
EXPANDED PLASMA CLEANER |
| Our Expanded Plasma Cleaner is a larger benchtop plasma instrument and extensively used for nanoscale surface cleaning and surface activation. |
FEATURES |
| Larger, benchtop unitAdjustable RF power settings (Low, Medium, High) Maximum RF power of 30WIncludes a 6″ diameter x 6.5″ length Pyrex chamberHinged door with viewing windowActive fan coolingIntegral switch for a vacuum pump1/8″ NPT metering valve to qualitatively control gas flow and chamber pressure1/8″ NPT 3-way valve to quickly switch from introducing gas, venting and isolating the chamber Weight: 37 lbsSize: 11″ H x 18″ W x 9″ DOptional PlasmaFlo gas mixer allows quantitative control of up totwo (2) process gases and monitoring of vacuum pressureOptional quartz chamber and sample trayCompatible vacuum pump available |
REQUIREMENTS |
| Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and ultimate total pressure of 200 mTorr (0.27 mbar) or lessFor pumping nonreactive gases (air, N2, Ar), see our Standard Vacuum Pumps. For pumping concentrated or pure oxygen gas, see our Oxygen Service Pumps. |
