VTC-300USS
SPIN COATER VTC-300USS
VTC-300USS is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate
up to 12″. The system consists of (1) a 12″ spin coater with the vacuum chuck, (2) compressed air-assisted ultrasonic spray nozzle
mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system for substrate heating. It also can be considered
as a atmosphere mist CVD system
