VTC-200P

VTC-200P is Anti-Corrosion Spin Coater made of Polypropylene (PP) material, which can be used for active acidic or alkali solution,

especially suitable for use inside glovebox under Ar gas. 4” dia. vacuum chuck is included for coating wafer up to 6″. The digital

control box is separated from a spin coater which allows you to operate in the remote location. The spinning speed is variable

from 500-8000 rpm with six programmable segments. The package includes the oilless vacuum pump and a 20ml syringe for

immediate use. This spin coater can be used under Argon atmosphere inside the glovebox