VTC-100PAX

VTC-100PAX is ultra-fast spin coater up to 12500 rpm for Max. 5″ dia. wafer. The spin head actuator is a precision DC servo motor

with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has an LCD display

for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed

from the front panel. All components in the device are corrosion protected to make it cleanroom compatible.

The spin-coater can be used in the glovebox with Ar gas.